DOI | Resolve DOI: https://doi.org/10.1557/PROC-686-A3.6 |
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Author | Search for: Sheng, S. R.1; Search for: Dion, M.; Search for: Mcalister, S. P.1; Search for: Rowell, N. L.2 |
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Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
- National Research Council of Canada. NRC Institute for National Measurement Standards
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Format | Text, Article |
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Conference | 2001 MRS Fall Meeting: Symposium A: Materials issues in novel Si-based technology, 26-28 November 2001, Boston, Massachusetts, USA |
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Abstract | High-quality short-period Si/SiGe strained-layer superlattices have been grown on bulk single-crystal SiGe substrates using a commercial low-temperature ultrahigh vacuum chemical vapor deposition (UHV/CVD) reactor. These superlattices were characterized by high-resolution x-ray diffraction (HRXRD), Auger electron spectroscopy (AES), atomic force microscopy (AFM), cross-sectional transmission electron microscopy (XTEM) and photoluminescence (PL). HRXRD, AES, and XTEM results confirm that the materials deposited are high crystal-quality superlattice layers with abrupt interfaces and excellent thickness and composition uniformity across superlattices of 5 periods. AFM images show similar surface RMS roughness of much less than 1 nm for both the top layer surface and the starting substrate surface, indicating very smooth surfaces. PL measurements further confirm material quality and composition, and show sharp, well-resolved near band-edge BE and FE PL and strong broad sub-gap PL perhaps related to direct-gap superlattice transitions. The materials grown here are very promising for applications of both high-speed electronic devices and high-efficiency optoelectronic devices. |
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Publication date | 2002 |
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Series | |
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Language | English |
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Peer reviewed | Yes |
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NRC number | NRC-INMS-1375 |
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NPARC number | 12346271 |
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Export citation | Export as RIS |
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Report a correction | Report a correction (opens in a new tab) |
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Record identifier | 3b6e551a-d09c-44f3-8124-28305afa27b1 |
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Record created | 2009-09-17 |
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Record modified | 2020-03-30 |
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