Surface cleaning and preparation in AlGaN/GaN-based HEMT processing as assessed by X-ray photoelectron spectroscopy
Surface cleaning and preparation in AlGaN/GaN-based HEMT processing as assessed by X-ray photoelectron spectroscopy
DOI | Resolve DOI: https://doi.org/10.1016/j.apsusc.2007.01.016 |
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Format | Text, Article |
Publication date | 2007 |
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NPARC number | 12744268 |
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Record identifier | 4639c7b3-057d-4307-b85c-cb87bf463e10 |
Record created | 2009-10-27 |
Record modified | 2020-05-10 |
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