Influence of Hydrogen on the Solid Phase Epitaxial Regrowth of Strained Layer Silicon Germanium Alloys
Influence of Hydrogen on the Solid Phase Epitaxial Regrowth of Strained Layer Silicon Germanium Alloys
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Format | Text, Article |
Conference | Strained layer epitaxy : materials processing and device applications, San Francisco, California, USA, April 17-19, 1995 |
Publication date | 1995 |
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Language | English |
NPARC number | 12339336 |
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Record identifier | 46b20147-c9e8-40c3-a1de-6fa8cdb86d61 |
Record created | 2009-09-11 |
Record modified | 2020-04-29 |
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