Control of the principal refractive indices in biaxial metal oxide films

From National Research Council Canada

DOI	Resolve DOI: https://doi.org/10.1364/JOSAA.28.001830
Author	Search for: Wakefield, Nicholas G.; Search for: Sorge, Jason B.; Search for: Taschuk, Michael T.; Search for: Bezuidenhout, Louis W.; Search for: Brett, Michael J.¹; Search for: Sit, Jeremy C.
Affiliation	National Research Council of Canada. National Institute for Nanotechnology
Format	Text, Article
Subject	Columnar thin films; Common materials; Deposition angle; Experimental characterization; Glancing Angle Deposition; In-plane birefringence; Metal oxide film; Metal oxides; Substrate rotation; Unified framework; Birefringence; Deposition; Light refraction; Metallic compounds; Refractive index; Refractometers; Oxide films
Abstract	We provide both an extensive experimental characterization and a model for metal oxide, slanted columnar thin films fabricated using glancing angle deposition. The model is applicable to slanted posts of any type, deposited at a constant deposition angle, with variable azimuthal substrate rotation. The model is capable of predicting the column tilt, principal refractive indices, and in-plane birefringence under a single unified framework, given knowledge of common material parameters. This paper also establishes a number of additional important results, including the occurrence of negative in-plane birefringence and the occurrence of uniaxial films with nonzero columnar tilt. © 2011 Optical Society of America.
Publication date	2011-09-01
In	Journal of the Optical Society of America A: Optics and Image Science, and Vision 28, no. 9 (1 September 2011): 1830–1840.
Language	English
Peer reviewed	Yes
NPARC number	21271927
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Record identifier	56414aae-2121-448a-b494-5a445e00e397
Record created	2014-05-06
Record modified	2020-04-21

Date modified:: 2024-07-19