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Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1504/IJMTM.2006.009992
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • International Journal of Manufacturing Technology and Management 9, no. 1/2 (2006): 144–159.
NPARC number12744074
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Record identifier623e99af-518c-4e14-8b3f-f7ac9933342e
Record created2009-10-27
Record modified2020-04-22
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