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Plasma deposition of optical films and coatings: A review

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.1314395
AuthorSearch for: ; Search for: 1
Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Journal of Vacuum Science & Technology A 18, no. 6 (2000): 2619–2645.
NPARC number12744247
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Record identifier6bde0369-6ceb-49ab-8d67-0186b4e0173b
Record created2009-10-27
Record modified2020-03-26
Date modified: