Thickness and density evaluation for nanostructured thin films by glancing angle deposition

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.2131079
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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NPARC number12743771
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Record identifier6e7de59d-2ce7-46cd-8ac4-431d83f19b90
Record created2009-10-27
Record modified2020-04-07
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