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Thickness and density evaluation for nanostructured thin films by glancing angle deposition

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.2131079
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Journal of Vacuum Science & Technology B 23, no. 6 (2005): 2545–2552.
NPARC number12743771
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Record identifier6e7de59d-2ce7-46cd-8ac4-431d83f19b90
Record created2009-10-27
Record modified2020-04-07
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