Language selection

Government of Canada / Gouvernement du Canada

Search

Visible photoluminescence from helium-ion implanted carbon in silicon

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.360563
AuthorSearch for: 1; Search for: 1; Search for: ; Search for:
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
SubjectCARBON ADDITIONS; HELIUM IONS; HYDROGENATION; ION IMPLANTATION; PHOTOLUMINESCENCE; RAMAN SPECTRA; SILICON; TEM; WAFERS
Abstract
Silicon wafers implanted with 30 keV He ions at room temperature in a low pressure hydrocarbon atmosphere exhibited visible photoluminescence. The samples were characterized by Raman, infrared, transmission electron microscopy, and heavy ion elastic recoil detection analysis. Two different layers were distinguishable on top of the silicon, with the upper layer comprising mostly amorphous carbon, as confirmed on a similarly implanted Be sample. Green photoluminescence was found to arise from the thinner a‐Si1−xCx:H interface layer. Such a buried intermixed layer could be incorporated into a stable visible light emitting device based on crystalline silicon
Publication date
In
  • Journal of Applied Physics 78, no. 10 (15 November 1995): 6185–6188.
LanguageEnglish
NPARC number12328578
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifier70ee7943-c7ee-41c8-9211-c4f29f10c8a6
Record created2009-09-10
Record modified2020-04-29
Date modified: