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Improved High-Temperature Leakage in High-Density MIM Capacitors by Using a TiLaO Dielectric and an Ir Electrode

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1109/LED.2007.909612
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Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • IEEE Electron Device Letters 28, no. 12 (2007): 1095–1097.
NPARC number12744338
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Record identifier733bb21c-fb79-4b23-a4c7-e87b07188726
Record created2009-10-27
Record modified2020-05-10
Date modified: