Review of microshutters for switchable glass

From National Research Council Canada

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DOIResolve DOI: https://doi.org/10.1117/1.JMM.18.4.040901
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Affiliation
  1. National Research Council of Canada. Advanced Electronics and Photonics
FormatText, Article
Subjectglasses; electrodes; dielectrics; optical lithography; aluminum; manufacturing; microelectromechanical systems; camera shutters; reliability
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LanguageEnglish
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Record identifier7aef03bc-f157-4f22-a9f5-7a1d9d73def5
Record created2020-12-01
Record modified2020-12-15
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