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Process windows of nickel and platinum silicides in deep sub-micron regime

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Conference1995 MRS Fall Meeting: Silicide Thin Films: Fabrication, Properties, and Applications Symposium, Boston, Massachusetts, November 27-30, 1995
Publication date
In
  • Silicide thin films : fabrication, properties, and applications : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A. (1996): 59–64.
Series
  • Materials Research Society symposia proceedings 402.
NPARC number12330138
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Record identifier83b22300-01c0-4c84-ba49-607465a6cce4
Record created2009-09-10
Record modified2020-03-20
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