| DOI | Resolve DOI: https://doi.org/10.1109/CCECE53047.2021.9569127 |
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| Author | Search for: Allameh, Mehdi; Search for: Ramezanzadehyazdi, Shirin; Search for: Park, Bvoungyoul1; Search for: Shafai, Cyrus |
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| Affiliation | - National Research Council of Canada. Nanotechnology
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| Funder | Search for: Natural Sciences and Engineering Research Council of Canada |
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| Format | Text, Article |
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| Conference | 2021 IEEE Canadian Conference on Electrical and Computer Engineering (CCECE), September 12-17, 2021, ON, Canada |
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| Subject | SU-8; hard bake; mirror; thermal stress; annealing; sputtering; thermal evaporation; temperature measurement; metals; stress; thermal stresses |
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| Abstract | This article describes the fabrication and stress analysis of a tri-layer metal-polymer stack, for use as a thin film mirror. The effect of SU-8 hard bake on the final stress was investigated. The results showed that 275 degrees Celsius is sufficient temperature to enable thermally stable SU-8 2025. Chromium and Aluminum were investigated as metal layers and deposited on different samples using thermal evaporation and sputtering. Thermal evaporation is the recommended technique for having higher tensile stress causing a smooth mirror surface. Experiments showed that annealing metal layers after deposition increases the tensile stress and provides a thermally stable metal layer. |
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| Publication date | 2021-09-12 |
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| Publisher | IEEE |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 86b5432f-c600-4e6b-affe-1f048baa3a3c |
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| Record created | 2023-05-11 |
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| Record modified | 2023-05-11 |
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