| DOI | Trouver le DOI : https://doi.org/10.1109/CCECE53047.2021.9569127 |
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| Auteur | Rechercher : Allameh, Mehdi; Rechercher : Ramezanzadehyazdi, Shirin; Rechercher : Park, Bvoungyoul1; Rechercher : Shafai, Cyrus |
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| Affiliation | - Conseil national de recherches du Canada. Nanotechnologie
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| Bailleur de fonds | Rechercher : Natural Sciences and Engineering Research Council of Canada |
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| Format | Texte, Article |
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| Conférence | 2021 IEEE Canadian Conference on Electrical and Computer Engineering (CCECE), September 12-17, 2021, ON, Canada |
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| Sujet | SU-8; hard bake; mirror; thermal stress; annealing; sputtering; thermal evaporation; temperature measurement; metals; stress; thermal stresses |
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| Résumé | This article describes the fabrication and stress analysis of a tri-layer metal-polymer stack, for use as a thin film mirror. The effect of SU-8 hard bake on the final stress was investigated. The results showed that 275 degrees Celsius is sufficient temperature to enable thermally stable SU-8 2025. Chromium and Aluminum were investigated as metal layers and deposited on different samples using thermal evaporation and sputtering. Thermal evaporation is the recommended technique for having higher tensile stress causing a smooth mirror surface. Experiments showed that annealing metal layers after deposition increases the tensile stress and provides a thermally stable metal layer. |
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| Date de publication | 2021-09-12 |
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| Maison d’édition | IEEE |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 86b5432f-c600-4e6b-affe-1f048baa3a3c |
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| Enregistrement créé | 2023-05-11 |
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| Enregistrement modifié | 2023-05-11 |
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