Two-stage plasma liner formation with thin films

From National Research Council Canada

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  1. National Research Council of Canada
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In
LanguageEnglish
Peer reviewedYes
NRC numberNRC-IRC-11585
NPARC number20327193
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Record identifier87a400b2-3158-47af-8a1a-e5dd355b0abf
Record created2012-07-18
Record modified2024-03-22
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