| Alternative title | Silicon Nitride and Silicon Dioxide Thin Films VII |
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| Author | Search for: Botton, G.; Search for: Romain, E.; Search for: Landheer, Dolf1; Search for: Wu, X.; Search for: Wu, M-Y; Search for: Lee, M.; Search for: Lu, Z-H |
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| Affiliation | - National Research Council Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Conference | Spring ECS Meeting, March 23-April 1, 2003, Paris, France |
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| NPARC number | 12346215 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 9dcca308-697d-453c-afdd-1f78b51a0bef |
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| Record created | 2009-09-17 |
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| Record modified | 2020-04-16 |
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