Preparation and characterization of pulsed laser deposition (PLD) SiC films

From National Research Council Canada

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  1. National Research Council of Canada. NRC Industrial Materials Institute
FormatText, Article
Subjectpulsed laser deposition; SiC film; Si K-edge
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Peer reviewedYes
NPARC number21275995
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Record identifier9ea70817-512b-4462-9dc6-9f79461dcfa2
Record created2015-09-04
Record modified2020-04-22
Date modified: