Directions in nanofabrication
Directions in nanofabrication
DOI | Resolve DOI: https://doi.org/10.1007/978-3-7091-0424-8_1 |
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Author | Search for: Dew, Steven K.1; Search for: Stepanova, Maria1 |
Editor | Search for: Stepanova, Maria; Search for: Dew, Steven |
Name affiliation |
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Format | Text, Book chapter |
Book title | Nanofabrication: Techniques and Principles |
ISBN | 978-3-7091-0424-8 978-3-7091-0423-1 |
Pages | 3–8 |
Subject | atomic layer deposition; chemical mechanical polishing; electron beam lithography; nanoimprint lithography; nanofabrication technique |
Abstract | |
Publication date | 2011-10-04 |
Publisher | Springer, Vienna Springer |
Language | English |
Peer reviewed | Yes |
NPARC number | 21275852 |
Export citation | Export as RIS |
Report a correction | Report a correction | Record identifier | abefe548-55a1-4eb0-b7cd-b7b9d5080d0b |
Record created | 2015-07-14 |
Record modified | 2020-09-01 |