Directions in nanofabrication

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1007/978-3-7091-0424-8_1
AuthorSearch for: 1; Search for: 1
EditorSearch for: Stepanova, Maria; Search for: Dew, Steven
Name affiliation
  1. National Research Council of Canada. National Institute for Nanotechnology
FormatText, Book chapter
Book titleNanofabrication: Techniques and Principles
ISBN978-3-7091-0424-8
978-3-7091-0423-1
Pages38
Subjectatomic layer deposition; chemical mechanical polishing; electron beam lithography; nanoimprint lithography; nanofabrication technique
Abstract
Publication date
PublisherSpringer, Vienna
Springer
LanguageEnglish
Peer reviewedYes
NPARC number21275852
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Record identifierabefe548-55a1-4eb0-b7cd-b7b9d5080d0b
Record created2015-07-14
Record modified2020-09-01
Date modified: