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Equilibrium position of misfit dislocations in thin epitaxial films

From National Research Council Canada

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DOIResolve DOI: https://doi.org/10.1088/0268-1242/18/4/320
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Abstract
The role of the free surface in determining the equilibrium position of misfit dislocations in thin epitaxial films is considered. When the film is elastically stiffer than the substrate, the core of the dislocation is predicted to lie at some distance from the interface in the softer substrate. On the other hand, when the film is softer than the substrate, the core of the dislocation is always predicted to lie close to the interface.
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  • Semiconductor Science and Technology 18, no. 4 (26 February 2003): 307–311.
LanguageEnglish
NPARC number12744594
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Record identifierad103f66-14d3-4497-9c57-8a104e0ce75d
Record created2009-10-27
Record modified2020-04-02
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