| Download | - Will be available here on September 25, 2024
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| DOI | Resolve DOI: https://doi.org/10.1088/1681-7575/acf9a8 |
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| Author | Search for: Eves, Brian J.1ORCID identifier: https://orcid.org/0000-0003-2481-0334; Search for: Leroux, Ian Daniel1 |
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| Affiliation | - National Research Council of Canada. Metrology Research Centre
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| Format | Text, Article |
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| Abstract | A phase shifting interferometer and a deformable mirror were used to study the impact of surface form on autocollimators, which detect the orientation of a plane reflecting surface. As real surfaces are not strictly planar, autocollimators must reduce a distribution of local surface orientations to a single reported angle, implicitly defining a measurand. Plausible choices of the summary statistic used to collapse an angle distribution to a single number can disagree by \SI{4}{\arcsecond} for a surface with a \SI{35}{mm} diameter and \SI{130}{nm} standard deviation from the best-fit plane. Combining a general framework for specifying autocollimator measurand definitions with Monte-Carlo simulation of random test surfaces yields estimates of the plausible differences between autocollimator measurands as a function of surface deformation amplitude, and shows the existence of three separate classes of measurands according to their sensitivity to subsets of the Zernike polynomials. Uncertainties due to surface form and measurand ambiguity can be eliminated by explicitly specifying a plane angle measurand for imperfect surfaces, such as a least-squares plane fit realized using an interferometer. |
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| Publication date | 2023-09-25 |
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| Publisher | IOP |
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| Licence | |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | b156144a-d8cf-4be3-b2d5-8cbb242c8a85 |
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| Record created | 2023-09-15 |
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| Record modified | 2024-05-01 |
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