| Téléchargement | - Sera disponible ici le 25 septembre 2024
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| DOI | Trouver le DOI : https://doi.org/10.1088/1681-7575/acf9a8 |
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| Auteur | Rechercher : Eves, Brian J.1Identifiant ORCID : https://orcid.org/0000-0003-2481-0334; Rechercher : Leroux, Ian Daniel1 |
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| Affiliation | - Conseil national de recherches du Canada. Centre de recherche en métrologie
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| Format | Texte, Article |
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| Résumé | A phase shifting interferometer and a deformable mirror were used to study the impact of surface form on autocollimators, which detect the orientation of a plane reflecting surface. As real surfaces are not strictly planar, autocollimators must reduce a distribution of local surface orientations to a single reported angle, implicitly defining a measurand. Plausible choices of the summary statistic used to collapse an angle distribution to a single number can disagree by \SI{4}{\arcsecond} for a surface with a \SI{35}{mm} diameter and \SI{130}{nm} standard deviation from the best-fit plane. Combining a general framework for specifying autocollimator measurand definitions with Monte-Carlo simulation of random test surfaces yields estimates of the plausible differences between autocollimator measurands as a function of surface deformation amplitude, and shows the existence of three separate classes of measurands according to their sensitivity to subsets of the Zernike polynomials. Uncertainties due to surface form and measurand ambiguity can be eliminated by explicitly specifying a plane angle measurand for imperfect surfaces, such as a least-squares plane fit realized using an interferometer. |
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| Date de publication | 2023-09-25 |
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| Maison d’édition | IOP |
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| Licence | |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | b156144a-d8cf-4be3-b2d5-8cbb242c8a85 |
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| Enregistrement créé | 2023-09-15 |
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| Enregistrement modifié | 2024-05-01 |
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