ELNES and EDS Maing in HfOxNy Thin Films and AlN/TiN Superlattices

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceMicroscopy and Microanalysis 2004, August 1-5, 2004, Savannah, Georgia, USA
NPARC number12346697
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Record identifierbce7c3df-8385-4364-ab87-bfe79e8a7127
Record created2009-09-17
Record modified2020-04-16
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