Low RF loss and noise of transmission lines on Si substrates using an improved ion implantation process

Alternative title	Microwave Symposium Digest
Author	Search for: Chan, K.; Search for: Chin, A.; Search for: McAlister, Sean¹; Search for: Chang, C.; Search for: Tseng, C.; Search for: Liang, V.; Search for: Chen, J.; Search for: Chien, S.; Search for: Duh, D.; Search for: Lin, W.
Affiliation	National Research Council of Canada. NRC Institute for Microstructural Sciences
Format	Text, Article
Conference	2003 IEEE MTT-S International, 2003
NPARC number	12346409
Export citation	Export as RIS
Report a correction	Report a correction (opens in a new tab)
Record identifier	bea86762-4b69-4d7b-bc9a-c5682dc6b1b3
Record created	2009-09-17
Record modified	2020-04-16