Minimum profile ultrahigh vacuum gate valve based on linear/rotary motion feedthrough

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.580000
AuthorSearch for: 1
Affiliation
  1. National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
FormatText, Article
SubjectDESIGN; MOLECULAR BEAMS; POSITIONING; REMOTE CONTROL; ULTRAHIGH VACUUM; VACUUM SYSTEMS; VALVES
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NPARC number12334516
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Record identifierc485eed5-2a4e-4f4e-8b61-8d883d9760b7
Record created2009-09-10
Record modified2020-03-20
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