DOI | Trouver le DOI : https://doi.org/10.1116/1.580000 |
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Auteur | Rechercher : Stolow, Albert1 |
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Affiliation | - Conseil national de recherches du Canada. Institut Steacie des sciences moléculaires du CNRC
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Format | Texte, Article |
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Sujet | DESIGN; MOLECULAR BEAMS; POSITIONING; REMOTE CONTROL; ULTRAHIGH VACUUM; VACUUM SYSTEMS; VALVES |
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Résumé | A simple, very low profile (< 1 in.) ultrahigh vacuum gate valve for isolation of molecular beam sources is described. The radial gate drive is based upon a linear/rotary motion feedthrough. A novel coupling scheme is described where the linear motion is used to translate the gate while the rotary motion is used to independently raise and lower the gate. A molecular beam skimmer, mounted on the gate, may be accurately and reproducibly located. |
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Date de publication | 1996-06-30 |
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Dans | |
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Numéro NPARC | 12334516 |
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Exporter la notice | Exporter en format RIS |
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Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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Identificateur de l’enregistrement | c485eed5-2a4e-4f4e-8b61-8d883d9760b7 |
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Enregistrement créé | 2009-09-10 |
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Enregistrement modifié | 2020-03-20 |
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