Planar and maskless selective growth of AlGaN/GaN HEMT structures on Si111 substrates by ammonia molecular beam epitaxy

Author	Search for: Haffouz, Soufien¹; Search for: Bardwell, Jennifer¹; Search for: Tang, Haipeng¹; Search for: Kochtane, A.; Search for: Baribeau, J-M; Search for: Rolfe, Stephen¹
Affiliation	National Research Council of Canada. NRC Institute for Microstructural Sciences
Format	Text, Article
Conference	The 31th Workshop on Compound Semiconductor Devices and Integrated Circuits, 2007
NPARC number	12346546
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Record identifier	c6e388d7-fd9c-4f5a-a1ad-330fa72520f5
Record created	2009-09-17
Record modified	2020-04-16