Author | Search for: Dobrowolski, J. A.1; Search for: Poitras, Daniel1; Search for: Cassidy, Tom1; Search for: Midwinter, Clive |
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Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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Format | Text, Article |
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Conference | Eighth Optical Society of America Topical Meeting on Optical Interference Coatings, Banff, Alberta, Canada, 15-20 July 2001 |
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Abstract | A black layer coating for an Al/photoresist interface is described with a reflectance less than 0.1% for 413 nm s-polarized light incident at 25º. It is made of space-compatible materials and its RMS roughness is less than 15Å. |
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Publication date | 2001 |
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Series | |
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Language | English |
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NPARC number | 12346334 |
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Export citation | Export as RIS |
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Report a correction | Report a correction (opens in a new tab) |
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Record identifier | caf23a6e-abfd-4c75-b725-aac4a726bdcc |
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Record created | 2009-09-17 |
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Record modified | 2020-03-27 |
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