Structure of Hafnium silicate films formed by atomic layer deposition

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1149/1.3206616
AuthorSearch for: ; Search for: 1; Search for: ; Search for: 1
Name affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Journal titleECS Transactions
ISSN1938-5862
1938-6737
Volume25
Issue6
Pages163172
Abstract
Publication date
LanguageEnglish
Peer reviewedYes
NPARC number21276871
Export citationExport as RIS
Report a correctionReport a correction
Record identifiercb2f666e-e529-4ec1-91b3-b0a0c3877302
Record created2015-10-27
Record modified2020-04-16
Date modified: