DOI | Resolve DOI: https://doi.org/10.1109/PN.2019.8819562 |
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Author | Search for: Dedyulin, S.1; Search for: Janz, S.2; Search for: Xu, D. X.2; Search for: Todd, A. D. W.1; Search for: Vachon, M.2; Search for: Wang, S.2; Search for: Weber, J.2 |
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Affiliation | - National Research Council of Canada. Metrology Research Centre
- National Research Council of Canada. Advanced Electronics and Photonics
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Format | Text, Article |
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Conference | 2019 Photonics North (PN), May 21-23, 2019, Quebec City, QC, Canada |
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Subject | silicon photonics; thermometry; sensors; diffraction gratings; elemental semiconductors; integrated optoelectronics; silicon; temperature measurement; thermometers |
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Abstract | We present the design and experimental results for a silicon photonic thermometer module for secondary and working thermometry standards. The chip is mechanically robust and insensitive to contamination. Using surface coupling gratings the chip temperature can be monitored remotely using free space beams, thereby eliminating temperature hysteresis effects arising from conventional optical assembly methods and materials. |
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Publication date | 2019-05-21 |
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Publisher | IEEE |
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In | |
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Language | English |
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Peer reviewed | Yes |
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Export citation | Export as RIS |
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Report a correction | Report a correction (opens in a new tab) |
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Record identifier | d4b0a5a8-cf4f-4241-8d52-f3ad9a301700 |
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Record created | 2021-08-24 |
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Record modified | 2021-08-24 |
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