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Thermal stability of platinum silicide insub-micron lines

From National Research Council Canada

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Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Conference1995 MRS Fall Meeting, Symposium on Materials reliability issues in microelectronics V, San Francisco, California, USA, April 17-21, 1995
Publication date
In
  • Materials reliability issues in microelectronics V (1995): 223–228.
Series
  • Materials Research Society symposia proceedings 391.
LanguageEnglish
NPARC number12338466
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Record identifierd55688eb-7fbc-4fbe-9d5d-b5dea48d63e4
Record created2009-09-10
Record modified2020-04-29
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