Beam focusing characteristics of silicon microtips with an in-plane lens

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1109/16.556161
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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LanguageEnglish
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NPARC number21264934
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Record identifierdaa68061-f651-4262-ac69-4f1124dcaba8
Record created2013-03-21
Record modified2020-03-20
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