| DOI | Resolve DOI: https://doi.org/10.1364/OL.20.001450 |
|---|
| Author | Search for: Montcalm, Claude1; Search for: Sullivan, Brian T.1; Search for: Duguay, Sophie1; Search for: Ranger, M.1; Search for: Steffens, W.1; Search for: Pépin, Henri; Search for: Chaker, M. |
|---|
| Affiliation | - National Research Council Canada. NRC Institute for Microstructural Sciences
|
|---|
| Format | Text, Article |
|---|
| Abstract | With a new ultrahigh-vacuum deposition/ref lectometer system, Mo/Y multilayer mirrors were deposited by dc-magnetron sputtering and characterized in situ with synchrotron radiation. The Mo/Y multilayer mirrors, measured before exposure to air, had near-normal-incidence reflectances as high as 46% at wavelengths near 11.4 nm. After several days of exposure these samples typically had a relative reflectance loss of ~10% as a result of oxidation of the top Mo layer. The best Mo/Y multilayers were fabricated with base pressures below the low 10-9 Torr range and after a bakeout to reduce water vapor in the chamber. |
|---|
| Publication date | 1995-06-15 |
|---|
| In | |
|---|
| NPARC number | 12327606 |
|---|
| Export citation | Export as RIS |
|---|
| Report a correction | Report a correction (opens in a new tab) |
|---|
| Record identifier | db41f240-b509-4f74-9d85-1c892f7ab8f9 |
|---|
| Record created | 2009-09-10 |
|---|
| Record modified | 2020-04-29 |
|---|
