Low temperature epitaxy of Si/Si1-xGex heterostructures using a commercially available UHV-CVD reactor

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Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
  2. National Research Council Canada. NRC Institute for National Measurement Standards
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LanguageEnglish
NRC numberNRC-INMS-1176
NPARC number8897868
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Record identifierdd8719ea-7dbb-4f2a-aae4-637ee875490b
Record created2009-04-22
Record modified2020-03-20
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