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Fabrication and structural and optical properties of amorphous Si/SiO2 superlattices on (100)Si

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceMaterials Research Society Meeting, Symposium G, Structure and properties of multilayered thin films, San Francisco, California, USA, April 17-19, 1995
Publication date
In
  • Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A. (1995): 259–264.
Series
  • Materials Research Society symposia proceedings 382.
LanguageEnglish
NPARC number12338943
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Record identifiere0c8e523-a057-4acd-a5e5-8085478d3790
Record created2009-09-11
Record modified2020-04-29
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