Growth and characterization of Si/SiGe strained-layer superlattices on bulk single-crystal SiGe and Si substrates

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0022-0248(03)01018-2
AuthorSearch for: 1 ; Search for: ; Search for: 1 ; Search for: 2 
Name affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
  2. National Research Council Canada. NRC Institute for National Measurement Standards
FormatText
TypeArticle
Journal titleJournal of Crystal Growth
ISSN0022-0248
Volume253
IssueJune
Pages7784; # of pages: 8
SubjectA3. superlattices; A3. chemical vapor deposition processes; B1. Germanium silicon alloys
Abstract
Publication date
Terms of use
LanguageEnglish
Identifier10137063
NRC number1086
NPARC number5764553
Export citationExport as RIS
Report a correctionReport a correction
Record identifiere118db86-e47d-41db-8b25-e790938198cc
Record created2009-03-29
Record modified2019-02-18
Date modified: