Growth and characterization of Si/SiGe strained-layer superlattices on bulk single-crystal SiGe and Si substrates

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0022-0248(03)01018-2
AuthorSearch for: 1; Search for: ; Search for: 1; Search for: 2
Name affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Institute for National Measurement Standards
FormatText, Article
ISSN0022-0248
SubjectA3. superlattices; A3. chemical vapor deposition processes; B1. Germanium silicon alloys
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LanguageEnglish
Identifier10137063
NRC numberNRC-INMS-1086
NPARC number5764553
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Record identifiere118db86-e47d-41db-8b25-e790938198cc
Record created2009-03-29
Record modified2020-04-02
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