| DOI | Resolve DOI: https://doi.org/10.1117/12.2267868 |
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| Author | Search for: Alonso-Ramos, Carlos A.; Search for: Le Roux, Xavier; Search for: Benedikovic, Daniel; Search for: Vakarin, Vladyslav; Search for: Durán-Valdeiglesias, Elena; Search for: Pérez-Galacho, Diego; Search for: Cassan, Eric; Search for: Marris-Morini, Delphine; Search for: Cheben, Pavel1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Vivien, Laurent |
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| Affiliation | - National Research Council Canada. Medical Devices
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| Format | Text, Address |
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| Conference | SPIE Microtechnologies, May 8-10, 2017, Barcelona, Spain |
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| Abstract | The large transparency window of silicon (1.1 - 8 μm wavelength range) makes it a promising material for the implementation of on-chip sensors operating over an ultra-wide wavelength range. However, the implementation of the silicon-on-insulator platform is restricted by the absorption of buried oxide layer for wavelengths above 4 μm. Here, we report our advances in development of silicon waveguides for broadband operation extending from near- to mid-infrared wavelengths. We present suspended silicon waveguides that exploit a novel periodic corrugation approach to circumvent the buried oxide absorption problem and provide effective single mode operation simultaneously for near- and mid-infrared wavelengths. |
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| Publication date | 2017-06-16 |
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| Publisher | Society of Photo-Optical Instrumentation Engineers (SPIE) |
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| Series | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 23002297 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | e26a94ae-38ae-4b36-bc58-7f5bae3b7190 |
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| Record created | 2017-10-12 |
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| Record modified | 2021-04-23 |
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