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Si1-x-yGexCy Alloy Growth by Electron Cyclotron Resonance Plasma-Assisted Si Molecular Beam Epitaxy

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0921-5107(01)00802-9
AuthorSearch for: 1; Search for: 1; Search for: ; Search for: 1; Search for: 1
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Materials Science & Engineering B 89, no. 1-3 (2002): 296–302.
NPARC number12744560
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Record identifiere3d988bc-007f-442a-9677-a1ef2019c1be
Record created2009-10-27
Record modified2020-03-30
Date modified: