Ultra-violet photoenhanced wet etching of GaN in K2S2O8 solution

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.1352684
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
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Publication date
In
LanguageEnglish
Peer reviewedYes
NPARC number12327650
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Record identifiere9349cd6-10ad-439a-aa82-b95c5cf63f2a
Record created2009-09-10
Record modified2023-04-17
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