Electron-beam patterning of cobalt fluoride on 10-nm length scale
Electron-beam patterning of cobalt fluoride on 10-nm length scale
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Format | Text, Article |
Conference | 48th International Symposium of the American Vacuum Society, October 28th-November 2nd, 2001, San Francisco, California |
Abstract | |
Publication date | 2001-10-30 |
Publisher | American Vacuum Society |
In | |
Language | English |
Peer reviewed | Yes |
NRC publication | This is a non-NRC publication"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC. |
Identifier | SC-TuA11 |
Export citation | Export as RIS |
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Record identifier | ec0cd87c-a2e4-4613-98b9-4d0133478ec2 |
Record created | 2020-10-07 |
Record modified | 2020-10-07 |
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