Photo-enhanced chemical wet etching of GaN

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0921-5107(02)00323-9
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
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NPARC number12328468
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Record identifierf2065d26-7f77-4c21-90d8-124b0c4da676
Record created2009-09-10
Record modified2020-04-06
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