High efficiency blazed fiber-chip grating coupler with interleaved trenches

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.2178620
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Name affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText
TypeArticle
Proceedings titleIntegrated Optics: Physics and Simulations II
Series titleProceedings of SPIE; no. 9516
ConferenceSPIE Optics + Optoelectronics, April 13-15, 2015, Prague, Czech Republic
ISSN0277-786X
1996-756X
ISBN9781628416374
Article number95160J
Subjectintegrated optics; coupling efficiency; DUV lithography; grating couplers; high-efficiency; silicon photonics; silicon thickness; SOI; SOI substrates; silicon wafers
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PublisherSPIE
LanguageEnglish
Peer reviewedYes
NPARC number21276909
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Record created2015-11-10
Record modified2019-08-23
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