| DOI | Resolve DOI: https://doi.org/10.1117/12.875752 |
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| Author | Search for: Svitelskiy, O.1; Search for: Sauer, V.1; Search for: Liu, N.; Search for: Cheng, K.-M.1; Search for: Finley, E.1; Search for: Freeman, M.R.1; Search for: Hiebert, W.K.1 |
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| Affiliation | - National Research Council of Canada. National Institute for Nanotechnology
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| Format | Text, Article |
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| Conference | Microfluidics, BioMEMS, and Medical Microsystems IX, January 23-25, 2011, San Francisco, CA, USA |
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| Subject | Comprehensive studies; Fluid Damping; High Pressure; Liquid CO; Multiple devices; Non-newtonian; Optical interferometry; Relaxation time models; Resonant dynamics; Small scale; Ultra-fast; Viscous limits; Viscousity; Biosensors; Carbon dioxide; Damping; Interferometry; Microfluidics; Microsystems; Fluids |
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| Abstract | Interactions of NEMS with fluids are of interest both in determining the NEMS performance outside of vacuum, and in elucidation of fluid dynamics at these small scales. We present a comprehensive study of nanomechanical damping in three gases (He, N 2, CO 2), and liquid CO 2. Resonant dynamics in multiple devices of varying size and frequency (10-400 MHz) is measured over 10 decades of pressure (1 mPa-20 MPa). We find a fluid relaxation time model to be valid throughout, but not beyond, the non-Newtonian regime (up to several atmospheres), and classical vibrating spheres model to be valid in the viscous limit. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE). |
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| Publication date | 2011 |
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| Publisher | SPIE |
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| In | |
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| Series | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 21271184 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | f49e3448-99c3-49ec-80b6-9ca17aa17342 |
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| Record created | 2014-03-24 |
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| Record modified | 2020-04-21 |
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