| DOI | Trouver le DOI : https://doi.org/10.1117/12.875752 |
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| Auteur | Rechercher : Svitelskiy, O.1; Rechercher : Sauer, V.1; Rechercher : Liu, N.; Rechercher : Cheng, K.-M.1; Rechercher : Finley, E.1; Rechercher : Freeman, M.R.1; Rechercher : Hiebert, W.K.1 |
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| Affiliation | - Conseil national de recherches du Canada. Institut national de nanotechnologie
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| Format | Texte, Article |
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| Conférence | Microfluidics, BioMEMS, and Medical Microsystems IX, January 23-25, 2011, San Francisco, CA, USA |
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| Sujet | Comprehensive studies; Fluid Damping; High Pressure; Liquid CO; Multiple devices; Non-newtonian; Optical interferometry; Relaxation time models; Resonant dynamics; Small scale; Ultra-fast; Viscous limits; Viscousity; Biosensors; Carbon dioxide; Damping; Interferometry; Microfluidics; Microsystems; Fluids |
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| Résumé | Interactions of NEMS with fluids are of interest both in determining the NEMS performance outside of vacuum, and in elucidation of fluid dynamics at these small scales. We present a comprehensive study of nanomechanical damping in three gases (He, N 2, CO 2), and liquid CO 2. Resonant dynamics in multiple devices of varying size and frequency (10-400 MHz) is measured over 10 decades of pressure (1 mPa-20 MPa). We find a fluid relaxation time model to be valid throughout, but not beyond, the non-Newtonian regime (up to several atmospheres), and classical vibrating spheres model to be valid in the viscous limit. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE). |
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| Date de publication | 2011 |
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| Maison d’édition | SPIE |
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| Série | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Numéro NPARC | 21271184 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | f49e3448-99c3-49ec-80b6-9ca17aa17342 |
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| Enregistrement créé | 2014-03-24 |
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| Enregistrement modifié | 2020-04-21 |
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