Large Q-factor Improvement for spiral inductors on silicon using proton implantation

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1109/LMWC.2003.819383
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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NPARC number12744407
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Record identifierf509704e-11ac-408f-aa54-b6375a6f2372
Record created2009-10-27
Record modified2020-04-02
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