| DOI | Resolve DOI: https://doi.org/10.1116/1.588132 |
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| Author | Search for: Gao, L. J.; Search for: Anderson, G. W.; Search for: Esposto, F.; Search for: Norton, P. R.; Search for: Mason, B. F.1; Search for: Lu, Z.-H.1; Search for: Graham, M. J.1 |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Subject | CHEMICAL COMPOSITION; COMPARATIVE EVALUATIONS; INDIUM ANTIMONIDES; PASSIVATION; ROUGHNESS; SULFUR COMPOUNDS; SURFACE STRUCTURE |
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| Abstract | InP(100) surfaces were S passivated in S2Cl2, (NH4)2S and sulfide-containing Br2 solutions. After S2Cl2 treatments, observations using atomic force microscopy indicated that the sample surface was rougher than the as-received sample. Some residual oxide was also identified by Auger electron spectroscopy and x-ray photoelectron spectroscopy analysis. Treatment of InP(100) in (NH4)2S and Br2/MeOH solutions containing trace amounts of S2Cl2 and (NH4)2S significantly reduced the surface roughness of the as-received sample. These treated surfaces were also found to be free of oxide and S passivated. These solutions therefore effectively removed the native oxide leaving substrates approaching atomic flatness and subsequently passivated surfaces with sulfur from the solution. |
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| Publication date | 1995-09 |
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| In | |
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| Language | English |
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| NPARC number | 12338165 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | f510cfd8-d4fd-4edf-884f-3197128533d6 |
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| Record created | 2009-09-10 |
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| Record modified | 2020-04-29 |
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