| DOI | Trouver le DOI : https://doi.org/10.1116/1.588132 |
|---|
| Auteur | Rechercher : Gao, L. J.; Rechercher : Anderson, G. W.; Rechercher : Esposto, F.; Rechercher : Norton, P. R.; Rechercher : Mason, B. F.1; Rechercher : Lu, Z.-H.1; Rechercher : Graham, M. J.1 |
|---|
| Affiliation | - Conseil national de recherches du Canada. Institut des sciences des microstructures du CNRC
|
|---|
| Format | Texte, Article |
|---|
| Sujet | CHEMICAL COMPOSITION; COMPARATIVE EVALUATIONS; INDIUM ANTIMONIDES; PASSIVATION; ROUGHNESS; SULFUR COMPOUNDS; SURFACE STRUCTURE |
|---|
| Résumé | InP(100) surfaces were S passivated in S2Cl2, (NH4)2S and sulfide-containing Br2 solutions. After S2Cl2 treatments, observations using atomic force microscopy indicated that the sample surface was rougher than the as-received sample. Some residual oxide was also identified by Auger electron spectroscopy and x-ray photoelectron spectroscopy analysis. Treatment of InP(100) in (NH4)2S and Br2/MeOH solutions containing trace amounts of S2Cl2 and (NH4)2S significantly reduced the surface roughness of the as-received sample. These treated surfaces were also found to be free of oxide and S passivated. These solutions therefore effectively removed the native oxide leaving substrates approaching atomic flatness and subsequently passivated surfaces with sulfur from the solution. |
|---|
| Date de publication | 1995-09 |
|---|
| Dans | |
|---|
| Langue | anglais |
|---|
| Numéro NPARC | 12338165 |
|---|
| Exporter la notice | Exporter en format RIS |
|---|
| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
|---|
| Identificateur de l’enregistrement | f510cfd8-d4fd-4edf-884f-3197128533d6 |
|---|
| Enregistrement créé | 2009-09-10 |
|---|
| Enregistrement modifié | 2020-04-29 |
|---|
