| Author | Search for: Luo, H.; Search for: Ban, D.; Search for: Liu, Hui1; Search for: Springthorpe, Anthony1; Search for: Wasilewski, Zbigniew1; Search for: Buchanan, Margaret1; Search for: Glew, R. |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Conference | 11th Canadian Semiconductor Technology Conference, August 19, 2003, Ottawa, ON |
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| NPARC number | 12346505 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | f6e7a703-6a31-4ce5-ba4e-a9d4bd6d0571 |
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| Record created | 2009-09-17 |
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| Record modified | 2020-04-16 |
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