Téléchargement | - Voir la version finale : Polarization insensitive metamaterial engineered multimode interference coupler in a 220 nm silicon-on-insulator platform (PDF, 3.5 Mio)
|
---|
DOI | Trouver le DOI : https://doi.org/10.1016/j.optlastec.2023.109493 |
---|
Auteur | Rechercher : Pérez-Armenta, Carlos; Rechercher : Ortega-Moñux, Alejandro; Rechercher : Manuel Luque-González, José; Rechercher : Halir, Robert; Rechercher : Schmid, Jens1; Rechercher : Cheben, Pavel1; Rechercher : Molina-Fernández, Iñigo; Rechercher : Gonzalo Wangüemert-Pérez, J. |
---|
Affiliation | - Conseil national de recherches du Canada. Quantique et nanotechnologies
|
---|
Format | Texte, Article |
---|
Sujet | silicon photonics; silicon-on-insulator; subwavelength gratings; multimode interference; polarization insensitivity |
---|
Résumé | High-index contrast silicon waveguides exhibit strong birefringence that hinders the development of polarization-insensitive devices, especially for sub-micrometer silicon layer thickness. Here a polarization-independent 2 × 2 multimode interference coupler in a 220 nm silicon-on-insulator platform is designed and experimentally demonstrated for the first time. Leveraging the advanced control of electromagnetic properties provided by a subwavelength grating metamaterial topology, our multimode interference coupler operates for both TE and TM polarization states with measured polarization dependent loss, insertion loss and imbalance all less than 1 dB, and phase errors below 5◦ in the wavelength range from 1500 nm to 1560 nm. The device has a footprint of only 3.5 µm × 47.25 µm and was fabricated using a single etch-step process with a minimum feature size of 100 nm compatible with immersion deep-UV lithography. |
---|
Date de publication | 2023-04-25 |
---|
Maison d’édition | Elsevier |
---|
Licence | |
---|
Dans | |
---|
Langue | anglais |
---|
Publications évaluées par des pairs | Oui |
---|
Identificateur | S0030399223003869 |
---|
Exporter la notice | Exporter en format RIS |
---|
Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
---|
Identificateur de l’enregistrement | 80ace21e-8235-439e-aad0-1206317e12f8 |
---|
Enregistrement créé | 2024-05-02 |
---|
Enregistrement modifié | 2024-05-02 |
---|